%PDF-1.3
%âãÏÓ
12 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#C#…�\.
Í�,.×. ¨%
endstream
endobj
7 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#c…�\.
Í�,.×. rì
endstream
endobj
1 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 129>>stream
xœs
áÒw3T°PIã2P0TÐ5T0P°T02·Ð33QÉåÒpÉ/ÏËÉOLIMQ(ËLTöôõ÷Sprv
RõóSÈÏSðJÌ+M,ªT°ÐQ0202SH,Q02´24±26WˆÑ
qŽÑÔÓÉâ²DÍv
á
·
endstream
endobj
5 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#c…�\.
Í�,.×. rì
endstream
endobj
3 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 140>>stream
xœŽA D÷œb–º¬1MãÒD/ Àö¾¡ÐðiŒ··lfVóÞÜ2Ïì¬Îèpê°×€Ëµ×C»¨Ã‹¡ÖUnƬÛ[´Eçâ�W8y¿ñD‘ æ\�×Ê9 rBÈ_ÔŒHž+/®Rü¡�;'²šàJå1’è£ý¨&o/Zîê‡U¤1Ë
endstream
endobj
11 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#c…�\.
Í�,.×. rì
endstream
endobj
8 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#C#…�\.
Í�,.×. ¨%
endstream
endobj
13 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#c…�\.
Í�,.×. rì
endstream
endobj
6 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#C#…�\.
Í�,.×. ¨%
endstream
endobj
9 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 46>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#c…�\.
Í�,.×. rì
endstream
endobj
4 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#C#…�\.
Í�,.×. ¨%
endstream
endobj
10 0 obj
<>>>/BBox[0 0 625.44 818.36]/Length 47>>stream
xœs
áÒw3T°PIã2T0 BCcC#=s#C#…�\.
Í�,.×. ¨%
endstream
endobj
15 0 obj
<>stream
Issue10.1021/acsphotonics.1c00525
VoR
endstream
endobj
16 0 obj
<>stream
xœ+ä î |
endstream
endobj
17 0 obj
<>stream
xœSä*ä*T0T0 B™œ« ‘i¦à’¯ˆUÊ"È ‹
endstream
endobj
18 0 obj
<>stream
xœ+ä î |
endstream
endobj
19 0 obj
<>stream
xœSä*ä*T0T0 B™œ« ‘i¢à’¯ˆUÊ"È Šºý
endstream
endobj
20 0 obj
<>stream
xœ+ä î |
endstream
endobj
21 0 obj
<>stream
xœSä*ä*T0T0 B™œ« ‘i à’¯ˆUÊ·”n)cˆT ƒhœ
endstream
endobj
22 0 obj
<>stream
xœ+ä î |
endstream
endobj
23 0 obj
<>stream
xœSä*ä*T0T0 B™œ« ‘i¡à’¯ˆUÊ"È ‹n
endstream
endobj
24 0 obj
<>stream
xœ+ä î |
endstream
endobj
25 0 obj
<>stream
xœSä*ä*T0T0 B™œ« ‘ih à’¯ˆ]Î"È £›
W
endstream
endobj
26 0 obj
<>
endobj
37 0 obj
<>stream
hÞ¬{M“#Ç‘¥íî¥î{Çi
-k$3¾#F{¡š©Ù¡Fb÷m�Ü…î‚ˆŠ ªZ¥?º¿dîëïyDfUÅ3IÆ®tÄ·»‡ûs�ˆŸ®Ìl3»*]o¼�å¾tÑ™ÙíU4±óvüe;þÒ%×'ù¡µiôw³ÝÕgoŽy¶:ÎÌì¸ê«·föñxõ“нüß̆qzi5[ÝòçÛ«~ÖÙì¥�W�Ô6IÆç0T—ÊN>¶W=ÿ=´ÇûÔùèŸmå/´Üýõ'<òáW͸U—™û>\Tw/ÏUyøsS}Ê•§mž0åŸ+Ü'büÙU’·eämì;Ÿ¬,YgÖ̬íŠñ³ÃZªKUÓ�u9íq8'UÙÖº.&?h
×*µ7,üþð;åBêJR¢¹0`Ðýe;üææ,?Ô6]µÛ˜É,µŠ¹s}ž…\:_ÜÌö¹ë{«»ä¸¨l¦ü–´¨kÂ_Ó•b¹¤öÅ�·´.hñó¬x§µS9«\…JßÙ({?“5dêYqŒ�¨ KK‰µ1Âfa^HŽúZ
‡Xl£ë ;/{#²|±ñ?Of;fvøø’´d¡‰êï®>û#ª¿“ÕEYj)*¬ú
vãf1‡.õ}œ½»ånëÑ?{·Â?Ÿ®¾Ÿ¿Ýì>²ÔׯΙ.Íÿ¼Üí_ýß·Éÿ*�[í